Method of fabricating micro actuator having media stage

ABSTRACT

A method of fabricating a micro actuator is provided including a media stage having a media loading surface and a coil for driving the media stage, formed on the opposite surface of the media stage to the media loading surface. The method includes forming a groove on a first surface of a first substrate, forming a coil on a first surface of a second substrate, bonding the first surface of the first substrate to the first surface of the second substrate, and forming the media loading surface on a second surface of the second substrate, which is opposite the first surface of the second substrate.

CROSS-REFERENCE TO RELATED PATENT APPLICATION

This application claims priority from Korean Patent Application No.10-2005-0126099, filed on Dec. 20, 2005, in the Korean IntellectualProperty Office, the disclosure of which is incorporated herein in itsentirety by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a method of fabricating anelectromagnetic micro actuator used in a data storage system employing ascanning probe microscopy (SPM) technology, and more particularly, to amethod of fabricating a micro actuator that can increase the storagecapacity of a data storage system by improving an area efficiency of amedia stage.

2. Description of the Related Art

Generally, a typical data storage system employing SPM technologyincludes a data storage medium mounted on a media stage, a driving unitfor driving the data storage medium in X and Y-axes, one or more probeseach having a tip for reading and writing data from and to the datastorage medium, and a signal process unit for processing data signals.

In order to drive the data storage medium in the X and Y-axes, anelectrostatic micro actuator or an electromagnetic micro actuator aregenerally used. The former uses an electrostatic force generated betweena driving electrode and a stationary electrode. The latter uses theLorenz force generated by an interaction between coils mounted on themedia stage and permanent magnets mounted above and below the coil.

In the electrostatic micro actuator, since the media stage and thedriving unit are located on an identical plane, the usable area of thestage relative to the overall size of the micro actuator is low. Thisreduces the data storage capacity.

In the electromagnetic micro actuator, the coils are formed on the mediastage, and thus the data storage medium can be located only in the areawhere the coils are not formed, which reduces the usable area relativeto the overall size of the media stage. Furthermore, since theelectromagnetic micro actuator has a relatively wide displacement range,a large current is required. This can cause power loss.

SUMMARY OF THE INVENTION

An aspect of the present invention provides a method of fabricating amicro actuator that can increase an area efficiency and reduce powerloss.

According to an aspect of the present invention, there is provided amethod of fabricating a micro actuator including a media stage having amedia loading surface and a coil for driving the media stage, the coilbeing formed on the opposite surface of the media stage to the medialoading surface, the method including: forming a groove on a firstsurface of a first substrate; forming a coil on a first surface of asecond substrate; bonding the first surface of the first substrate tothe first surface of the second substrate; and forming the media loadingsurface on a second surface of the second substrate, which is oppositethe first surface of the second substrate.

According to another aspect of the present invention, there is provideda method of fabricating a micro actuator including a media stage havinga media loading surface and a coil for driving the media stage, the coilbeing formed on the opposite surface of the media stage to the medialoading surface, the method including: forming a groove and a firstelectrode on a first surface of a glass substrate; forming a coil and asecond electrode on a first surface of a silicon substrate;anodic-bonding the first surface of the glass substrate to the firstsurface of the silicon substrate such that the first and secondelectrodes contact each other to form an electrode pad for applying anelectric current; and forming the media loading surface on a secondsurface of the silicon substrate, which is opposite the first surface ofthe silicon substrate, by etching the second surface to a depth within arange where the coil is not exposed.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other aspects of the present invention will become moreapparent by describing in detail exemplary embodiments thereof withreference to the attached drawings in which:

FIG. 1 is an exploded perspective view of a micro actuator fabricated bya method according to an exemplary embodiment of the present invention;

FIG. 2A is a top view of a media stage depicted in FIG. 1;

FIG. 2B is a bottom view of a media stage depicted in FIG. 1;

FIG. 3 is a sectional view of the micro actuator depicted in FIG. 1;

FIG. 4 is a schematic view of the driving principal of the media stagedepicted in FIG. 1;

FIGS. 5A through 5C are views illustrating a process for formingelectrodes and grooves on a glass substrate;

FIGS. 6A through 6G are views illustrating a process for forming coilsand electrodes on a silicon substrate; and

FIGS. 7A through 7E are views illustrating a process for forming a datastorage medium loading surface after a silicon substrate is bonded to aglass substrate.

DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS OF THE INVENTION

Various aspects of the present invention will now be described morefully with reference to the accompanying drawings, in which exemplaryembodiments of the invention are shown.

FIG. 1 is an exploded perspective view of a micro actuator fabricated bya method according to an exemplary embodiment of the present inventionand FIG. 2A is a top view of a media stage depicted in FIG. 1.

Referring to FIGS. 1 and 2, a micro actuator 11 includes a cantilever13, a data storage medium 17, a media stage 14 on which the data storagemedium 17 is mounted, a stage base 38 for supporting the media stage 14,four pairs of permanent magnets 23 and 26 located above and below themedia stage 14, yokes 29 for forming/directing the magnetic field of thepermanent magnets 23 and 26, a plurality of stiffeners 32 which preventa rotation of the media stage 14, and a plurality of elastic beams 35.Coils for driving the media stage 14 are located on the bottom surfaceof the media stage 14, and thus are not shown in FIG. 1.

The elastic beams 35 are located on four corners of the media stage 14,and the media stage 14 moves along X or Y-axis according to a drivingprincipal that will be described later. Each of the elastic beams 35includes a first elastic beam section 35X for supporting an elasticforce in the direction of the X axis, and a second elastic beam section35Y for supporting an elastic force in the direction of the Y-axis. Theelastic beams 35 are elastically deformed by the movement of the mediastage 14.

The stiffeners 32 surround the media stage 14, and are spaced apart fromand located in parallel with the respective sides of the media stage 14.Opposite ends of each stiffener 32 are connected to the first and secondbeam sections 35X and 35Y of each elastic beam 35 to prevent the mediastage 14 from rotating in a direction other than the directions of the Xand Y-axes.

The data storage medium 17 is loaded on the media stage 14. The mediastage 14 is formed of silicon and lifted from the stage base 38 bysupporting beams 41 each having a bottom surface contacting the stagebase 38.

FIG. 2B is a bottom view of the media stage depicted in FIG. 1.

Referring to FIG. 2B, the coils 20 are formed on four side edges of thebottom surface of the media stage 14. A plurality of electrode pads 44extend respectively from the coils 20 to the four corners of the stagebase 38 contacting the media stage 14.

Therefore, the coils 20 are not exposed to the top surface of the mediastage 14, thereby increasing the area of the media stage 14 where themedium 17 can be loaded.

FIG. 3 is a sectional view of the micro actuator depicted in FIG. 1, andFIG. 4 is a schematic view of the driving principle of the media stagedepicted in FIG. 1.

Referring to FIGS. 3 and 4, the permanent magnets are located such thata magnetic field is formed across half of each coil 20. When an electriccurrent i is applied to the coils 20, the magnetic field B is formed inthe thickness direction of the media stage 14, and the Lorenz force F isgenerated orthogonal to the current i and magnetic field B. Then, themedia stage 14 holding the data storage medium 17 is moved in thedirections of the X or Y-axis by the Lorenz force F. When current issimultaneously applied to another pair of opposing coils 20, the drivingforce on the media stage 14 can be doubled. Alternatively, the opposingcoils can be used to detect the movement of the media stage 14 using aninduced electromotive force.

A method of fabricating the micro actuator will now be described withreference to the accompanying drawings.

Referring first to FIG. 5A, a first electrode 52 is formed on a glasssubstrate 50, and a groove etching mask 56 is formed. The firstelectrode 52 and the groove etching mask 56 may be formed of Cr and/orAu.

Next, as shown in FIG. 5B, the glass substrate 50 is etched to form agroove 54. HF at a ratio of 3:1 may be used as an etchant.

Then, as shown in FIG. 5C, the etching mask 56 is removed to completethe stage base 38 with the groove 54.

FIGS. 6A through 6G are views illustrating a process for forming a coiland a second electrode on a silicon substrate.

The silicon substrate 60 may be formed of a silicon-on-insulator (SOI)substrate including a handle wafer 63, an oxidation layer 66 and adevice layer 67.

As shown in FIG. 6A, after forming a mask pattern for a coil 62 on thesilicon substrate 60 through a photolithography process, a trench 68 isformed by inductively coupled plasma reactive ion etching (ICP-RIE).

Next, as shown in FIG. 6B, a passivation layer 70 is formed through athermal oxidation process.

Then, as shown in FIGS. 6C and 6D, metal is filled into the trench 68 bychemical vapor deposition (CVD) or electroplating. For example, whenelectroplating is used, a seed layer 72 is deposited on the passivationlayer 70 using a sputtering device (see FIG. 6C), and a plating layer 74is formed through electroplating (see FIG. 6D) using the seed layer 72as a seed for the plating layer 74.

Next, as shown in FIG. 6E, the plating layer 74 exposed above the trench68 is polished, for example by chemical mechanical polishing (CMP),thereby completing the coil 62.

Then, as shown in FIGS. 6F and 6G, the second electrode 64 is formed toapply an electric current to the coil 62. That is, after forming aninsulation layer 76 (see FIG. 6F), the second electrode 64 is formed bymetal deposition, mask patterning and metal etching.

FIGS. 7A through 7E are views illustrating a process for forming a datastorage medium loading surface after the silicon substrate is bonded tothe glass substrate.

Referring first to FIG. 7A, the top surface 60 a of the siliconsubstrate 60 and the top surface 50 a of the glass substrate 50 arebonded to each other such that the first and second electrodes 52 (seeFIG. 5 c) and 64 (see FIG. 6G) contact each other. Then, the secondelectrodes 64 connected to the first electrodes 52 are exposed throughan etching process that will be described later, to function as anelectrode pad 65 for applying the electric current to the coil 62.

The bonding may be an anodic bonding process, employing a field assistedsealing technology. In the anodic bonding process, several hundred voltsare applied between the silicon and glass substrates 60 and 50 to makethe silicon substrate 60 an anode and the glass substrate 50 a cathode.The temperature is then raised to several hundred degrees (□) so thatpositive ions of the glass substrate 50 increase in kinetic energy tomove to the surface of the glass substrate 50. The negative ions aremore strongly bonded to the glass substrate 50 and form a space chargelayer near the surface of the silicon substrate 60. As the positive ionsin the glass substrate 50 move to the surface of the glass substrate 50,the potential (or voltage) drop at the interface between the glasssubstrate 50 and the silicon substrate 60 increases, thereby bonding theglass and silicon substrates 50 and 60 at the interface by an electricfield.

Referring to FIG. 7B, the front surface of the silicon substrate 60 isetched after the anodic bonding. That is, handle wafer 63 and oxidationlayer 66 have been removed.

A wet etchant such as TMAH solution or KOH solution may be used as anetchant for etching the front surface of the silicon substrate 60. Whenan SOI substrate is used, the oxidation layer of the SOI may not beremoved.

At this point, the thickness of the media stage can be determined byselecting the thickness of the device layer 67 of the SOI substrate. Theelastic beam is the same thickness as the media stage, and affects thepower consumption. When the elastic beam is thinner, the mass of themedia stage and the stiffness of the elastic beams are reduced, toreduce the power consumption when the media stage is driven. When thesubstrate is not the SOI substrate having the oxidation layer, thethickness of the media stage can be determined according to an etchingdepth of the substrate. In this case, In order to minimize the powerconsumption, the etching depth may be adjusted within the range wherethe coil 62 is not exposed.

Referring to FIGS. 7C through 7E, the elastic beams (not shown) and thestiffeners 71 are formed such that the media stage can move in apredetermined direction, and the electrode pads 65 for applying theelectric current are formed through an etching process. That is, anetching mask 69 is formed in response to the shapes and locations of theelastic beams, the stiffeners, and the electrode pads (see FIGS. 7C and7D).

Then, the silicon substrate 60 is etched using the etching mask 69 asshown in FIG. 7E. The length of the media loading surface where the datastorage medium can be loaded is not the distance between the coils 62but is the overall length of the media stage, allowing a greater datastorage capacity.

By the above-described actuator fabrication method, the coils fordriving the media stage are formed on the bottom surface of the mediastage.

According to a feature of the present invention, the front surface ofthe silicon substrate, on which the coils are formed, is bonded to thefront surface of the glass substrate, on which the groove is formed, andthe media loading surface is formed on the rear surface of the siliconsubstrate. Therefore, the present invention has at least the followingadvantages:

Since the coils are not exposed to the top surface of the media stage,the whole area of the media stage can be used as the media loadingsurface. Therefore, the area and data storage efficiencies can beimproved.

The silicon substrate can be etched as deep as possible within the rangewhere the coils are not exposed. As a result, the thickness of the mediastage can be minimized to reduce the power consumption.

While the present invention has been particularly shown and describedwith reference to exemplary embodiments thereof, it will be understoodby those of ordinary skill in the art that various changes in form anddetail may be made therein without departing from the spirit and scopeof the present invention as defined by the following claims.

1. A method of fabricating a micro actuator comprising a media stagehaving a media loaded surface and a coil for driving the media stage,the coil being formed on the opposite surface of the media stage to themedia loaded surface, the method comprising: forming one groove on afirst surface of a first substrate; forming a trench having a shape ofthe coil on a first surface of a second substrate and filling the trenchwith metal to form the coil; bonding the first surface of the firstsubstrate to the first surface of the second substrate; and forming themedia loaded surface on a second surface of the second substrate, whichis opposite the first surface of the second substrate wherein an area ofthe one groove is larger than an area occupied by the coil.
 2. Themethod of claim 1, wherein the first surface of the first substrate andthe first surface of the second substrate are bonded to each other suchthat the first surface of the first substrate and first surface of thesecond substrate contact each other.
 3. The method of claim 1, whereinthe first substrate is a glass substrate and the second substrate is asilicon substrate.
 4. The method of claim 3, wherein the bonding of thefirst substrate to the second substrate is performed by anodic bonding.5. A method of fabricating a micro actuator comprising a media stagehaving a media loaded surface and a coil for driving the media stage,the coil being formed on the opposite surface of the media stage to themedia loaded surface, the method comprising: forming a groove on a firstsurface of a first substrate; forming the coil on a first surface of asecond substrate; bonding the first surface of the first substrate tothe first surface of the second substrate; and forming the media loadedsurface on a second surface of the second substrate, which is oppositethe first surface of the second substrate; wherein the forming of thecoil comprises: forming a trench on the second substrate using ICP-RIE(inductively coupled plasma reactive ion etching); forming a passivationlayer on the second substrate and the trench; filling the trench withmetal; removing metal exposed above the trench by polishing.
 6. Themethod of claim 5, wherein the filling of the trench is performed byelectroplating.
 7. The method of claim 5, wherein the forming of thegroove comprises forming a first electrode on the first substrate; andthe forming of the coil comprises forming a second electrode on thesecond substrate.
 8. The method of claim 7, wherein the bonding of thefirst substrate to the second substrate is performed such that the firstand second electrodes contact each other to form an electrode pad forapplying an electric current.
 9. The method of claim 8, wherein theforming of the media loaded surface comprises etching the second surfaceof the second substrate to a depth within a range where the coil formedon the second substrate is not exposed.
 10. The method of claim 9,wherein the forming of the media loaded surface comprises etching thesecond surface of the second substrate to expose the electrode pad. 11.The method of claim 8, wherein the second substrate is an SOI(silicon-on-insulator) substrate having an oxidation layer.
 12. Themethod of claim 11, wherein the forming of the media loaded surfacecomprises etching a second surface of the second substrate, which isopposite the first surface of the second substrate, to expose theoxidation layer; and etching the oxidation layer.
 13. The method ofclaim 12, wherein the forming of the media loaded surface comprisesetching the second surface of the second substrate to expose theelectrode pad.